A Novel Six-DOF Electromagnetic Precision Positioner Utilizing Hybrid Magnetic and Fluid Mechanism

In this paper, we present a novel mechanism and system implementation of six de-gree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3 mm times 3 mm times 4 mm with a positioning resolution of plusmn10 mum, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

[1]  Won-jong Kim,et al.  Six-axis nano-positioning with planar magnetic levitation , 2001, Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516).

[2]  Li-Chen Fu,et al.  Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism , 2006, 2006 American Control Conference.

[3]  Shorya Awtar,et al.  Synthesis and analysis of parallel Kinematic XY flexure mechanisms , 2003 .

[4]  Hideki Hashimoto,et al.  Two-dimensional fine particle positioning using a piezoresistive cantilever as a micro/nano-manipulator , 1999, Proceedings 1999 IEEE International Conference on Robotics and Automation (Cat. No.99CH36288C).

[5]  Min-Shin Chen,et al.  Position-dependent friction compensation for ballscrew tables , 1998, Proceedings of the 1998 IEEE International Conference on Control Applications (Cat. No.98CH36104).

[6]  David L. Trumper,et al.  Modeling and vector control of a planar magnetic levitator , 1997, IAS '97. Conference Record of the 1997 IEEE Industry Applications Conference Thirty-Second IAS Annual Meeting.

[7]  Li Xu,et al.  Adaptive robust precision motion control of linear motors with negligible electrical dynamics: theory and experiments , 2001 .

[8]  K. Pister,et al.  A planar air levitated electrostatic actuator system , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..