Structural and optical properties of amorphous In1-xPx films

Abstract In 1− x P x films have been prepared by rf sputtering with compositions in the range 0.4 x x > 0.5 but In-rich films contained crystallites. Extended X-ray absorption fine structure (EXAFS) and X-ray photoelectron spectroscopy measurements indicate that there is chemical disorder in the structural network of the a-In 1− x P x films, although chemical ordering is predominant. Optical absorption data are found to be consistent with this assertion. Partial coordination numbers, deduced from the EXAFS measurements, are interpreted using thermodynamic arguments.

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