A high performance room temperature THz sensor

Resonant THz antenna-coupled micro-bolometers are considered as a potential candidates for room temperature THz imaging, as well as spectroscopic applications. Micromachining technology is found to be well-suitable to fabricate a micro-meter bolometer sensor suitable for MEMS implementation. The sensitivity of the sensor is determined to be up to 1000V/W and the noise equivalent power (NEP) – is down to 5pW /√Hz. The sensor parameters are designed to be easily implemented with a low cost standard preamplifier array which increases the pixel sensitivity to 106V/W without compromising the noise equivalent power.

[1]  G. Valusis,et al.  Continuous Wave Spectroscopic Terahertz Imaging With InGaAs Bow-Tie Diodes at Room Temperature , 2013, IEEE Sensors Journal.

[2]  Mattias Beck,et al.  Stand-alone system for high-resolution, real-time terahertz imaging. , 2012, Optics express.

[3]  Laurent Dussopt,et al.  Broadband terahertz imaging with highly sensitive silicon CMOS detectors. , 2011, Optics express.

[4]  P. Siegel.  Terahertz Technology , 2001 .

[5]  Ullrich R. Pfeiffer,et al.  Terahertz imaging with CMOS/BiCMOS process technologies , 2010, 2010 Proceedings of ESSCIRC.

[6]  A. Krotkus,et al.  Performance of the antenna coupled microbolometers characterized by the quasi-optical measurements at frequencies 0.1–1.0 THz , 2013, 2013 38th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz).

[7]  Viktor Krozer,et al.  CMOS detector arrays in a virtual 10-kilopixel camera for coherent terahertz real-time imaging. , 2012, Optics letters.

[8]  E. Socher,et al.  Exploration of Terahertz Imaging with Silicon MOSFETs , 2014 .

[9]  A. Krotkus,et al.  A compact terahertz burst emission system driven with 1 μm fiber laser , 2013 .

[10]  Gintaras Valušis,et al.  InGaAs-based bow-tie diode for spectroscopic terahertz imaging , 2011 .

[11]  Janez Trontelj,et al.  Micro-machined millimeter wave sensor array for FM radar application , 2012, Optics/Photonics in Security and Defence.

[12]  Janez Trontelj,et al.  A Self-Mixing NMOS Channel-Detector Optimized for mm-Wave and THZ Signals , 2012 .