A monolithic 200-V CMOS analog switch

A new high-voltage CMOS technology is described which can increase the operating voltage of these circuits to more than 200 V. This represents approximately an order of magnitude improvement over present-day commercially available CMOS devices. The technology is straightforward to implement and uses n-channel MOS transistors and high-voltage p-channel devices. As an example of the capability of the technology, a monolithic quad CMOS analog switch has been fabricated which can handle 200-V, 0.3-A analog signals, with a dynamic range in excess of 150 dB.

[1]  A. S. Grove Physics and Technology of Semiconductor Devices , 1967 .

[2]  Robert W. Dutton,et al.  Threshold voltage controllability in double-diffused-MOS transistors , 1974 .

[3]  G. May,et al.  A 120-V micropower CMOS tactile display driver , 1976, 1976 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

[4]  G. D. Vendelin,et al.  D-MOS transistor for microwave applications , 1972 .

[5]  A.G.F. Dingwall,et al.  Surface doping using ion implantation for optimum guard layer design in COS/MOS structures , 1975, IEEE Transactions on Electron Devices.

[6]  James D. Meindl,et al.  An ultrasonic imaging system for realtime cardiac imaging , 1974 .

[7]  M. Pocha High voltage double diffused MOS transistors for integrated circuits , 1976 .

[8]  James D. Plummer,et al.  High voltage monolithic MOS driver arrays , 1971 .

[9]  E. D. Wolley,et al.  High-voltage planar p-n junctions , 1967 .

[10]  H. G. Dill,et al.  A new insulated gate tetrode with high drain breakdown potential and low miller feedback capacitance , 1968 .

[11]  M. Declercq,et al.  Avalanche breakdown in high-voltage D-MOS devices , 1976, IEEE Transactions on Electron Devices.

[12]  T. Masuhara,et al.  Device Design of an Ion Implanted High Voltage MOSFET , 1974 .

[13]  J. Berger,et al.  A high voltage MOS switch , 1975, IEEE Journal of Solid-State Circuits.

[14]  M. Conti,et al.  Surface breakdown in silicon planar diodes equipped with field plate , 1972 .