Figuring of plano-elliptical neutron focusing mirror by local wet etching.

Local wet etching technique was proposed to fabricate high-performance aspherical mirrors. In this process, only the limited area facing to the small nozzle is removed by etching on objective surface. The desired objective shape is deterministically fabricated by performing the numerically controlled scanning of the nozzle head. Using the technique, a plano-elliptical mirror to focus the neutron beam was successfully fabricated with the figure accuracy of less than 0.5 microm and the focusing gain of 6. The strong and thin focused neutron beam is expected to be a useful tool for the analyses of various material properties.

[1]  D. Lucca,et al.  Surfaces in Precision Engineering, Microengineering and Nanotechnology , 2003 .

[2]  Toru Ebisawa,et al.  Development of neutron supermirrors with large critical angle , 2007 .

[3]  T. Ishikawa,et al.  Fabrication of elliptical mirror at nanometer-level accuracy for hard x-ray focusing by numerically controlled plasma chemical vaporization machining , 2003 .

[4]  Yoshiharu Namba,et al.  Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications , 2008 .

[5]  Toru Ebisawa,et al.  Development of neutron supermirror with large-scale ion-beam sputtering instrument , 2006 .

[6]  Kazuya Yamamura,et al.  Fabrication of Ultra Precision Optics by Numerically Controlled Local Wet Etching , 2007 .

[7]  Hidekazu Mimura,et al.  Ultraprecision Machining Utilizing Numerically Controlled Scanning of Localized Atmospheric Pressure Plasma , 2006 .

[8]  Yoshiharu Namba,et al.  Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid bonded diamond wheels , 1999 .

[9]  G. Ice The Future of Spatially-Resolved Polychromatic Neutron and X-Ray Microdiffraction , 2008 .

[10]  Kazuya Yamamura,et al.  Development of numerically controlled local wet etching , 2007 .

[11]  Toru Ebisawa,et al.  Development of high-reflectivity neutron supermirrors using an ion beam sputtering technique , 2009 .

[12]  Akihisa Takeuchi,et al.  Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method , 2005 .