Broadband terahertz imaging with highly sensitive silicon CMOS detectors.

This paper investigates terahertz detectors fabricated in a low-cost 130 nm silicon CMOS technology. We show that the detectors consisting of a nMOS field effect transistor as rectifying element and an integrated bow-tie coupling antenna achieve a record responsivity above 5 kV/W and a noise equivalent power below 10 pW/Hz(0.5) in the important atmospheric window around 300 GHz and at room temperature. We demonstrate furthermore that the same detectors are efficient for imaging in a very wide frequency range from ~0.27 THz up to 1.05 THz. These results pave the way towards high sensitivity focal plane arrays in silicon for terahertz imaging.

[1]  A. Lisauskas,et al.  A CMOS focal-plane array for terahertz imaging , 2008, 2008 33rd International Conference on Infrared, Millimeter and Terahertz Waves.

[2]  M. Shur,et al.  Plasma wave detection of terahertz radiation by silicon field effects transistors: Responsivity and noise equivalent power , 2006 .

[3]  D Coquillat,et al.  Room temperature detection of sub-terahertz radiation in double-grating-gate transistors. , 2010, Optics express.

[4]  Mikhail I. Dyakonov,et al.  Field Effect Transistors for Terahertz Detection: Physics and First Imaging Applications , 2009, 0907.2523.

[5]  Ullrich R. Pfeiffer,et al.  Terahertz imaging detectors in a 65-nm CMOS SOI technology , 2010, 2010 Proceedings of ESSCIRC.

[6]  John L. Reno,et al.  Single-quantum-well grating-gated terahertz plasmon detectors , 2005 .

[7]  H. Roskos,et al.  Rational design of high-responsivity detectors of terahertz radiation based on distributed self-mixing in silicon field-effect transistors , 2009 .

[8]  C. Otani,et al.  Terahertz imaging system based on a backward-wave oscillator. , 2004, Applied optics.

[9]  Michael S. Shur,et al.  Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors , 2004 .

[10]  Matteo Perenzoni,et al.  Analysis and design of a CMOS-based terahertz sensor and readout , 2010, Photonics Europe.

[11]  M. Shur,et al.  Enhanced electromagnetic coupling between terahertz radiation and plasmons in a grating-gate transistor structure on membrane substrate. , 2010, Optics express.

[12]  M. Shur,et al.  Nonresonant Detection of Terahertz Radiation in Field Effect Transistors , 2002 .

[13]  T. Otsuji,et al.  A grating-bicoupled plasma-wave photomixer with resonant-cavity enhanced structure. , 2006, Optics express.

[14]  M. Shur,et al.  Detection, mixing, and frequency multiplication of terahertz radiation by two-dimensional electronic fluid , 1996 .

[15]  Alvydas Lisauskas,et al.  A 0.65 THz Focal-Plane Array in a Quarter-Micron CMOS Process Technology , 2009, IEEE Journal of Solid-State Circuits.

[16]  A. Lisauskas,et al.  Terahertz imaging with Si MOSFET focal-plane arrays , 2009, OPTO.