Mechanisms of optical activation of micromechanical resonators

Abstract The mechanism by which micromechanical resonators are optically activated is identified and discussed. By means of a one-dimensional analysis, a mathematical formula is derived to relate the mechanical resonance frequency to the power absorbed in the resonator beam. Agreement is found between the theoretical and experimental values of the amplitude of the resonance frequency.

[1]  S. Venkatesh,et al.  Self-excitation in fibre-optic microresonator sensors , 1990 .

[2]  Deepak Uttamchandani,et al.  Novel optically excited resonant pressure sensor , 1988 .

[3]  S. Venkatesh,et al.  Micromechanical resonators in fiber-optic systems. , 1987, Optics letters.

[4]  B. Culshaw,et al.  Optically excited resonant beam pressure sensor , 1987 .

[5]  A. Rosencwaig Thermal wave microscopy with photoacoustics , 1980 .

[6]  P. Andrekson,et al.  Linewidth determination from electrical noise measurements on semiconductor lasers , 1985 .

[7]  Miguel V. Andrés,et al.  Optical activation of a silicon vibrating sensor , 1986 .

[8]  D. Royer,et al.  Mechanical Excitation of a Membrane by an Optical Beam. , 1981 .

[9]  C. R. Petts,et al.  Photo Displacement Imaging , 1981, Second International Meeting on Photoacoustic Spectroscopy.

[10]  A. Rosencwaig,et al.  Thermal-wave detection and thin-film thickness measurements with laser beam deflection. , 1983, Applied optics.

[11]  Alan Cottrell,et al.  Mechanical Properties of Matter , 1964 .

[12]  D. E. N. Davies,et al.  An Analysis Of The Photothermal Drive Of A Quartz Force Sensor , 1985, Other Conferences.

[13]  B. Culshaw,et al.  Optically activated vibrations in a micromachined silica structure , 1985 .

[14]  Allen Gersho,et al.  Theory of the photoacoustic effect with solids , 1975 .

[15]  R. Kist,et al.  Optically Excited And Interrogated Micromechanical Silicon Cantilever Structure , 1987, Other Conferences.