论文信息 - Novel Micro Robots and Micro Motors using Lorentz Force Driven Linear Micro Actuators based on Polymer Magnets

Novel Micro Robots and Micro Motors using Lorentz Force Driven Linear Micro Actuators based on Polymer Magnets

This paper reports on the development of several novel MEMS machines based on linear Lorentz force actuators. These were monolithically fabricated and integrate micro machined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape and properties. Through the combination of these linear actuators with mechanical compliant structures using Epon SU-8, in-plane and out-of-plane micro positioners, micro motors and micro grippers were realized.

S. Buettgenbach | M. Feldmann

[1] Mark G. Allen,et al. Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices , 1998 .

[2] K.S.J. Pister,et al. Bidirectional inchworm motors and two-DOF robot leg operation , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[3] Weisong Wang,et al. Composite elastic magnet films with hard magnetic feature , 2004 .

[4] S. Buttgenbach,et al. Linear Variable Reluctance (VR) Micro Motors With Compensated Attraction Force: Concept, Simulation, Fabrication and Test , 2007, IEEE Transactions on Magnetics.

[5] George M. Whitesides,et al. Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems , 2005 .

[6] L. K. Lagorce,et al. Magnetic microactuators based on polymer magnets , 1999 .

[7] H. Gatzen,et al. Evaluation of a Linear Hybrid Microstep Motor by Means of Magnetic Flux Measurements , 2007, IEEE Transactions on Magnetics.

[8] Jan G. Korvink,et al. Structural optimization of a large-displacement electromagnetic Lorentz force microactuator for optical switching applications , 2004 .