论文信息 - FTS measurement of a 2.5 THz double-slot antenna on SiO2/Si3N4 membrane

FTS measurement of a 2.5 THz double-slot antenna on SiO2/Si3N4 membrane

Membrane-based NbN HEB mixers are being developed for new type of receivers. Taking advantage of the quasi-optic design allowed by the membrane, those detectors are expected to show numerous advantages and permit to easily design and process double-slot antennas up to several THz. This work presents the FTS measurements made with a membranebased double-slot antenna, designed at 2.5 THz, and using an NbN HEB mixer. As HEB mixers on SiO2/Si3N4 membranes are recent innovative devices, new technological challenges are faced, which limit the overall processing yield to about 30%. In order to improve the processing yield, we have developed a new processing procedure, which we present also in this paper. The results collected allow us to have high expectations.

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