Dependence of temperature coefficient of frequency (TCf) on crystallography and eigenmode in N-doped silicon contour mode micromechanical resonators
暂无分享,去创建一个
Joshua E.-Y. Lee | Haoshen Zhu | Cheng Tu | Joshua E-Y Lee | Haoshen Zhu | G. Shan | Cheng Tu | Guangcun Shan
[1] John J. Hall,et al. Electronic Effects in the Elastic Constants of n -Type Silicon , 1967 .
[3] B. Murmann,et al. Phase Lock Loop based Temperature Compensation for MEMS Oscillators , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
[4] G. Casinovi,et al. Passive TCF compensation in high Q silicon micromechanical resonators , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).
[5] F. Ayazi,et al. Temperature compensation of silicon micromechanical resonators via degenerate doping , 2009, 2009 IEEE International Electron Devices Meeting (IEDM).
[6] Farrokh Ayazi,et al. Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators , 2010, Journal of Microelectromechanical Systems.
[7] R. Keyes. Electronic Effects in the Elastic Properties of Semiconductors , 1968 .
[8] Siavash Pourkamali,et al. Sub-100ppb/°C temperature stability in thermally actuated high frequency silicon resonators via degenerate phosphorous doping and bias current optimization , 2010, 2010 International Electron Devices Meeting.
[9] Joshua E-Y Lee,et al. Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators , 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
[10] R. Howe,et al. Fully-differential poly-SiC Lame mode resonator and checkerboard filter , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..
[11] J. Wortman,et al. Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium , 1965 .
[12] T. Kenny,et al. Temperature-Insensitive Composite Micromechanical Resonators , 2009, Journal of Microelectromechanical Systems.
[13] M. Prunnila,et al. Temperature compensated resonance modes of degenerately n-doped silicon MEMS resonators , 2012, 2012 IEEE International Frequency Control Symposium Proceedings.
[14] Don Berlincourt,et al. Elastic and Piezoelectric Coefficients of Single-Crystal Barium Titanate , 1958 .
[15] H. Seppa,et al. Nonlinear limits for single-crystal silicon microresonators , 2004, Journal of Microelectromechanical Systems.
[16] A. Partridge,et al. Low jitter and temperature stable MEMS oscillators , 2012, 2012 IEEE International Frequency Control Symposium Proceedings.
[17] J. Dekker,et al. Temperature compensation of silicon MEMS Resonators by Heavy Doping , 2011, 2011 IEEE International Ultrasonics Symposium.
[18] F. Ayazi,et al. A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability , 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
[19] R. Abdolvand,et al. Turnover Temperature Point in Extensional-Mode Highly Doped Silicon Microresonators , 2013, IEEE Transactions on Electron Devices.
[20] J. Kiihamaki,et al. Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications , 2004, IEEE Electron Device Letters.
[21] Robert Puers,et al. A review of MEMS oscillators for frequency reference and timing applications , 2011 .
[22] R. Rebel,et al. Wafer-level chip scale MEMS oscillator for wireless applications , 2012, 2012 IEEE International Frequency Control Symposium Proceedings.
[23] H. Ekstein. Free Vibrations of Anisotropic Bodies , 1944 .
[24] Myron A. Jeppesen. Young's Modulus , 1955 .
[25] E. C. Stoner,et al. The Computation of Fermi-Dirac Functions , 1938 .
[26] R. Abdolvand,et al. Zero temperature coefficient of frequency in extensional-mode highly doped silicon microresonators , 2012, 2012 IEEE International Frequency Control Symposium Proceedings.
[27] H. J. Mcskimin. Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused Silica , 1953 .