论文信息 - Integrated ferroelectric stacked mim capacitors with 100 nF/mm2and 90 V breakdown as replacement for discretes - 字舞流文

Integrated ferroelectric stacked mim capacitors with 100 nF/mm2and 90 V breakdown as replacement for discretes

A. Roest | M. Klee | R. Mauczok | K. Reimann | K. Reimann | L. van Leuken-Peters | A. Roest | R. Mauczok | L. van Leuken-Peters