Nanometer edge profile measurement of diamond cutting tools by atomic force microscope with optical alignment sensor
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Satoshi Kiyono | Takenori Motoki | S. Kiyono | Wei Gao | T. Motoki | W. Gao
[1] Ekkard Brinksmeier,et al. Investigation of the diamond machinability of newly developed hard coatings , 2000 .
[2] Yuichi Okazaki,et al. Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder , 2003 .
[3] Gerber,et al. Atomic force microscope. , 1986, Physical review letters.
[4] Thomas A. Dow,et al. A controller architecture for integrating a fast tool servo into a diamond turning machine , 1994 .
[5] Norio Taniguchi,et al. 1993 ASPE distinguished lecturer , 1994 .
[6] Hyun-Kyu Kweon,et al. A New Method for Improving the Accuracy of SPM and Its Application to AFM in Liquids. , 1999 .
[7] David L. Trumper,et al. Design of a rotary fast tool servo for ophthalmic lens fabrication , 1999 .
[8] T. Moriwaki,et al. Machinability of Copper in Ultra-Precision Micro Diamond Cutting , 1989 .
[9] T. D. Doiron,et al. Computer vision based station for tool setting and tool form measurement , 1989 .
[10] Schubert Soãres. Nanometer edge and surface imaging using optical scatter , 2003 .
[11] D. O'shea,et al. Elements of Modern Optical Design , 1985 .
[12] J. Drescher. Scanning electron microscopic technique for imaging a diamond tool edge , 1993 .
[13] Thomas A. Dow,et al. Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces , 1991 .
[14] Christopher J. Evans,et al. Chemical aspects of tool wear in single point diamond turning , 1996 .
[15] S. Gonda,et al. REAL-TIME, INTERFEROMETRICALLY MEASURING ATOMIC FORCE MICROSCOPE FOR DIRECT CALIBRATION OF STANDARDS , 1999 .
[16] A. Yamamoto,et al. Measurement of the geometric features of a cutting tool edge with the aid of a digital image processing technique , 1989 .
[17] M. Zimmermann,et al. An empirical survey on the influence of machining parameters on tool wear in diamond turning of large single crystal silicon optics , 1999 .
[18] Thomas A. Dow,et al. Tool force model development for diamond turning , 1990 .
[19] Dong-Sik Kim,et al. Microscopic topographical analysis of tool vibration effects on diamond turned optical surfaces , 2002 .
[20] Hiroaki Tanaka,et al. Minimum thickness of cut in micromachining , 1992 .
[21] Y. Okazaki. Fast tool servo system and its application to three dimensional fine figures , 1998 .
[22] Don A. Lucca,et al. Effect of Tool Edge Geometry on Energy Dissipation in Ultraprecision Machining , 1993 .
[23] J. Oomen,et al. Wear of monocrystalline diamond tools during ultraprecision machining of nonferrous metals , 1992 .
[24] H. Dai,et al. Nanotubes as nanoprobes in scanning probe microscopy , 1996, Nature.
[25] Darell Engelhaupt,et al. Development of Wolter I x-ray optics by diamond turning and electrochemical replication , 1995 .
[26] Hyun-Kyu Kweon,et al. In situ self-calibration of atomic force microscopy , 1998 .
[27] Yoshio Ichida,et al. A study on ultra–high-speed cutting of aluminium alloy:: Formation of welded metal on the secondary cutting edge of the tool and its effects on the quality of finished surface , 2000 .
[28] Wei Gao,et al. Force measurement in a nanomachining instrument , 2000 .
[29] E. B. Magrab,et al. Design and testing of a fast tool servo for diamond turning , 1985 .
[30] Hyun-Kyu Kweon,et al. A New Method for Improving the Accuracy of SPM and Its Application to AFM in Liquid. , 1998 .