Local heating-induced plastic deformation in resistive switching devices

Resistive switching is frequently associated with local heating of the switching structure. The mechanical effect of such heating on Pt/SrTiO3 (001) Schottky barriers and on Pt/SrZrO3/SrRuO3/SrTiO3 switching devices was examined. The extent and magnitude of Joule heating was assessed using IR microscopy at power dissipation levels similar to what others have reported during electroforming. Lines aligned along the [100] and [010] directions were observed spreading laterally around the locally heated area imaged by IR. Atomic force microscopy, transmission electron microscopy. and electron channeling contrast imaging suggest these lines are slip lines due to the plastic deformation induced by the local compressive stresses created by Joule heating. The deformation pattern is identical to that produced by nanoindentation. The implications of deformation for resistive switching systems are discussed.

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