LCD 기판 세정건조용 스피너 설계를 위한 내부유동 해석

A numerical model is employed for design of a spinner device to dry the 5-th generation LCD glass panel. The turbulent flow in a spinner is driven by rotation of a large disk and suction by the exhaust system connected to vacuum chamber, which is simulated by using the FLUENT package, Based on numerical simulation, the required capacity of exhaust system is assessed. The effects of the presence of cover on the flow characteristics ate examined. A computational trouble shooting is attempted to resolve the problem of panel rising which occurred in real experiments.