Silicon Nitride Nanopillars and Nanocones Formed by Nickel Nanoclusters and Inductively Coupled Plasma Etching for Solar Cell Application

The external quantum efficiency of solar cells can be improved by using textured surface with minimum reflection. We have fabricated nanopillars and nanocone structures on silicon nitride surface by means of self-assembled nickel nano particle masks with single step inductively coupled plasma (ICP) ion etching and double step ICP etching, respectively. Thus, sub-wavelength nanopillar and nanoconelike structures displaying low reflectance were obtained readily without the need for any lithography equipment. The formation mechanism of nanopillar and nanocone like structures fabricated on silicon nitride surface has been discussed. The relationship of etching time with structure height and average reflectance spectra has been drawn. # 2009 The Japan Society of Applied Physics

[1]  S. Sze.  Semiconductor Devices: Physics and Technology , 1985 .

[2]  K. Kano.  Semiconductor Devices , 1997 .

[3]  Jeffrey A. Mazer,et al.  Solar Cells: An Introduction to Crystalline Photovoltaic Technology , 1996 .

[4]  Peng Jiang,et al.  Templated fabrication of large area subwavelength antireflection gratings on silicon , 2007 .

[5]  G. Michael Morris,et al.  Antireflection behavior of silicon subwavelength periodic structures for visible light , 1997 .

[6]  Zhaoning Yu,et al.  Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff , 2003 .

[7]  Yi Cui,et al.  Wafer-scale silicon nanopillars and nanocones by Langmuir-Blodgett assembly and etching , 2008 .

[8]  Chun-Wei Chang,et al.  Fabrication of Antireflective Sub-Wavelength Structures on Silicon Nitride Using Nano Cluster Mask for Solar Cell Application , 2009, Nanoscale research letters.

[9]  K. Nishioka,et al.  Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle , 2008 .

[10]  Claude Lévy-Clément,et al.  Design of porous silicon antireflection coatings for silicon solar cells , 2000 .

[11]  Yiming Li,et al.  Numerical calculation of the reflectance of sub-wavelength structures on silicon nitride for solar cell application , 2009, Comput. Phys. Commun..

[12]  Hong Xiao,et al.  Introduction to Semiconductor Manufacturing Technology , 2000 .