Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration
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S. Woody | Steven R Gillmer | J. Ellis | R. Smith | S. Gillmer | R C G Smith | S C Woody | J D Ellis
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S. Woody | Steven R Gillmer | J. Ellis | R. Smith | S. Gillmer | R C G Smith | S C Woody | J D Ellis