Design and Fabrication of Thick Film Sensors

This paper describes the stages in the construction of sensors implemented in thick film technology. The use of CAD facilities greatly reduces the time required for development, and automatic design rule checking minimises errors. Steps in the fabrication from layout to finished mask(s) are detailed and specific examples given. Strain gauges using piezoresistive properties of thick film resistor inks with various sheet resistivities (Du Pont HS80 series) printed on insulated stainless steel substrates were examined under strains ranging from 0 to ±1000 microstrain. Results show gauge factors to be dependent on the ink's sheet resistivity and range from 2 to 12. The temperature coefficients of resistance were determined over temperatures of +20°C to +140°C, revealing good tracking and reproducibility.