Real-time evolution of trapped charge in a SiO2 layer: An electrostatic force microscopy study

Time-dependent motion of localized electrons and holes trapped in a SiO2 layer is visualized with electrostatic force microscopy. Both negative and positive charges of up to ∼1010 e/cm2 are trapped at a SiO2–Si interface in ∼500-nm-diam area with a voltage stress between the tip and the sample. There is a higher probability for trapped charges to spread out in the plane direction than to de-trap toward the Si substrate. The dynamics is explained with diffusion and drift of the charges induced by Coulombic interaction.

[1]  John H. Davis,et al.  Noncontact scanning probe microscope potentiometry of surface charge patches: Origin and interpretation of time-dependent signals , 1998 .

[2]  Chohui Kim,et al.  Charge trap dynamics in a SiO2 layer on Si by scanning capacitance microscopy , 1999 .

[3]  Edward T. Yu,et al.  Charge storage in Co nanoclusters embedded in SiO2 by scanning force microscopy , 1999 .

[4]  Calvin F. Quate,et al.  Charge storage in a nitride‐oxide‐silicon medium by scanning capacitance microscopy , 1991 .

[5]  E. H. Nicollian,et al.  Mos (Metal Oxide Semiconductor) Physics and Technology , 1982 .

[6]  Young Kuk,et al.  Imaging of a silicon pn junction under applied bias with scanning capacitance microscopy and Kelvin probe force microscopy , 2000 .

[7]  J. Janata,et al.  Mapping of mobile charges on insulator surfaces with the electrostatic force microscope , 1993 .

[8]  Meng,et al.  Nanometer-Scale Creation and Characterization of Trapped Charge in SiO2 Films Using Ballistic Electron Emission Microscopy. , 1996, Physical review letters.

[9]  H. Juretschke,et al.  Introduction to Solid-State Theory , 1978 .

[10]  T. C. Mcgill,et al.  Charge storage in CeO2/Si/CeO2/Si(111) structures by electrostatic force microscopy , 1999 .

[11]  H. Grubin.  The physics of semiconductor devices , 1979, IEEE Journal of Quantum Electronics.

[12]  E. Cartier,et al.  Hot electron transport in SiO2 probed with a scanning tunnel microscope , 1995 .

[13]  S. Hudlet,et al.  CHARGE DYNAMICS AND TIME EVOLUTION OF CONTACT POTENTIAL STUDIED BY ATOMIC FORCE MICROSCOPY , 1997 .

[14]  Alvarado,et al.  Observation of single charge carriers by force microscopy. , 1990, Physical review letters.