Analysis of plane ultrasonic piezoelectric actuators

The basic characteristics of a piezoelectric actuator were theoretically analyzed, and the relationship between the thrust force and the weight force was clarified and verified by experiments. Various prototypes of plane ultrasonic piezoelectric actuators were experimentally constructed, and the fundamental characteristics were measured. The vibration mode of the actuators was analyzed by ANSYS, and compared with the experimental results. A possible application of the plane actuator may be in an area where a very complicated motion is required with limited space and weight, e.g., microrobots.<<ETX>>