Although many calculations since the early 1980s have predicted that high performance in thin crystalline silicon cells is feasible, performance levels demonstrated in the past have been quite modest. Using a self-supporting silicon membrane, experimen tal energy conversion efficiency above 20% is described for the first time for a silicon cell of less than 50 μm thickness, with efficiency up to 21.5% independently confirmed for a 47-μm thick device. The cells demonstrate a better ability to tra p light internally within their structure than any previously measured device. They also demonstrate the surface passivation benefits of the recently described parallel multijunction thin-film silicon cell approach.