Comparison Of Mass-sensitive Devices For Gas Sensing: Bulk Acoustic Wave (baw)- And Surface Acoustic Wave (saw) Transducers

In this work we investigated comparatively different BAW devices with fundamental frequencies of 10 and 30 MHz and SAW devices with fundamental frequencies of 80 and 433 MHz. Three aspects were of primary interest in this comparison: influence of temperature on the transducer signal before and after coating, 0 maximum achievable frequency shift by coating and 0 minimum threshold value to monitor different volatile organics (VOC's) in the environment. In view of future practical applications, we limited our investigations to a temperature range between 298 and 308 K with 303 K as routine measuring temperature. For the same reason analyte concentrations were chosen from the detection limit up to 1000 ppm.

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