论文信息 - The Little Machines That are Making it Big - 字舞流文

The Little Machines That are Making it Big

Microelectromechanical systems are currently used in a variety of applications, including triggering airbags and measuring the Casimir force. In the future, they may revolutionize the way we think about machines.

David J. Bishop | C. Randy Giles | Peter Ledel Gammel | C. R. Giles | D. Bishop | P. Gammel

[1] F. Capasso,et al. Quantum Mechanical Actuation of Microelectromechanical Systems by the Casimir Force , 2001, Science.

[2] C. A. Bolle,et al. Observation of mesoscopic vortex physics using micromechanical oscillators , 1999, Nature.

[3] Bishop Dj,et al. The rise of optical switching. , 2001 .

[4] David J. Bishop,et al. MEMS for Light-Wave Networks , 2001 .

[5] S. Sherman,et al. Fabrication technology for an integrated surface-micromachined sensor , 1993 .

[6] Bishop,et al. Micromechanical "Trampoline" magnetometers for use in large pulsed magnetic fields , 1998, Science.

[7] Darrin J. Young. Micromachining for rf Communications , 2001 .