论文信息 - Application of the Atomic Layer Etching technique to remove broken layers after plasma-etched GaAs surface treatment - 字舞流文

Application of the Atomic Layer Etching technique to remove broken layers after plasma-etched GaAs surface treatment

I. N. Kots | R. Tominov | Z. Vakulov | O. Ageev | V. S. Klimin | A. A. Rezvan | T. S. Abramovich | T. A. Zubova