Fabrication of Ultrathin Single‐Crystal Diamond Membranes

A method for preparing ultrathin single-crystal diamond membranes suitable for post-processing and liftout, is reported. The proposed method used single-crystal diamond substrates and two-energy ion implant process for the fabrication of thin diamond membranes. Two ion-implant process was used in this method to prepare two different damage layers within diamond sample. This method can be used for preparing integrated quantum-photonic structure based on color center in diamond. This method can also be used for fabricating various structures including Bragg gratings and whispering gallery mode resonators. A significant application of the diamond nanostructures is to fabricate the micro- and nanoscale cantilevers. It was also observed that the fabricated single-crystal diamond are suitable for another FIB processing.

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