论文信息 - Deep-reactive ion etching of silicon nanowire arrays at cryogenic temperatures - 字舞流文

Deep-reactive ion etching of silicon nanowire arrays at cryogenic temperatures

M. Foldyna | Jiushuai Xu | G. Hamdana | A. Delvallée | H. S. Wasisto | L. Šiaudinytė | A. D. Refino | J. Kottmeier | Jan K. Prüßing | Sebastian Seibert | Christian Schwalb | Poul-Erik Hansen | Andreas Dietzel | Thomas Weimann | Hartmut Bracht | Erwin Peiner