Laser-grown ZnO nanowires for room-temperature SAW-sensor applications

Abstract ZnO nanowires were grown on the active sensor surface of a surface acoustic wave (SAW) sensor via a vapour–liquid–solid (VLS) technique using pulsed laser deposition (PLD) as the particle source. The fabricated sensors were “delay-line” type (quartz substrate; ∼69.4-MHz central frequency). The nanowire length and diameter were controlled by the growth time and temperature, respectively. The sensor response at room temperature to various hydrogen (H 2 ) concentrations was recorded for different ZnO morphologies and nanowire thicknesses and compared with the performance of a thin-film sensor with a comparable amount of ZnO material. The sensor response depended on the ZnO volume and the morphology of the active surface. An increase in the ZnO volume enhanced the frequency shift for the same H 2 concentration, while the larger surface area of the longer nanowires enhanced the sensor response to low H 2 concentrations, enabling detection of concentrations as low as 0.01%.

[2]  A. Marcu,et al.  Pulsed laser deposition of YBCO thin films in a shadow mask configuration , 2000 .

[3]  Wojtek Wlodarski,et al.  Layered SAW gas sensor with single-walled carbon nanotube-based nanocomposite coating , 2007 .

[4]  Wojtek Wlodarski,et al.  A ZnO nanorod based layered ZnO/64° YX LiNbO3 SAW hydrogen gas sensor , 2007 .

[5]  W. Wlodarski,et al.  Hydrogen gas sensor based on highly ordered polyaniline nanofibers , 2009 .

[6]  K. Yamanaka,et al.  Principle and application of ball surface acoustic wave (SAW) sensor , 2009 .

[7]  C. Forsberg.  Future hydrogen markets for large-scale hydrogen production systems , 2007 .

[8]  David S. Ballantine,et al.  Acoustic wave sensors : theory, design, and physico-chemical applications , 1997 .

[9]  Palladium nanowire hydrogen sensor based on a SAW transducer , 2005, IEEE Sensors, 2005..

[10]  W. Jakubik,et al.  Investigations of thin film structures of WO3 and WO3 with Pd for hydrogen detection in a surface acoustic wave sensor system , 2007 .

[11]  A. Marcu,et al.  ZnO nanowire mophology control in pulsed laser deposition , 2009 .

[12]  Constantin Grigoriu,et al.  Nanocomposite sensitive polymeric films for SAW sensors deposited by the MAPLE direct write technique , 2011 .

[13]  Aurelian Marcu,et al.  Plume behavior and thin film deposition by laser ablation using a hellicoidal shadow mask , 2000, Other Conferences.

[14]  Peter Lindblad,et al.  Realizing the hydrogen future: the International Energy Agency's efforts to advance hydrogen energy technologies , 2003 .

[15]  Jordi Arbiol,et al.  Catalyst size limitation in vapor–liquid–solid ZnO nanowire growth using pulsed laser deposition , 2012 .

[16]  Constantin Grigoriu,et al.  SAW sensor based on highly sensitive nanoporous palladium thin film for hydrogen detection , 2013 .

[17]  C. Grigoriu,et al.  Particles movement and surface quality in PLD/PR systems , 2006 .

[18]  R. Ramachandran,et al.  An overview of industrial uses of hydrogen , 1998 .

[19]  Hidekazu Tanaka,et al.  Effect of ablated particle flux on MgO nanowire growth by pulsed laser deposition , 2007 .

[20]  C. Grigoriu,et al.  Particles interaction with obstacles in a pulsed laser deposition system , 2005 .

[21]  Gwiy-Sang Chung,et al.  Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst , 2012 .

[22]  Heon-Jin Choi,et al.  Controlled growth of ZnO nanowires and their optical properties , 2002 .

[23]  M. Penza,et al.  Surface Acoustic Wave 915 MHz resonator oscillator gas sensors using SnO2 nanowires-based nanocomposite layer , 2008, 2008 IEEE Sensors.

[24]  C. Grigoriu,et al.  Ablation particles parameters influences on VLS oxide nanowire growing , 2012 .

[25]  W. Wlodarski,et al.  Layered SAW gas sensor based on CSA synthesized polyaniline nanofiber on AlN on 64° YX LiNbO3 for H2 sensing , 2009 .

[26]  Stephen P. Arnold,et al.  Functionalized Ga2O3 nanowires as active material in room temperature capacitance-based gas sensors. , 2010, Langmuir : the ACS journal of surfaces and colloids.

[27]  C. Campbell.  Surface Acoustic Wave Devices and Their Signal Processing Applications , 1989 .

[28]  Constantin Grigoriu,et al.  Surface acoustic wave sensors with carbon nanotubes and SiO2/Si nanoparticles based nanocomposites for VOC detection , 2010 .