论文信息 - High-Speed MEMS Micromirror Switching - 字舞流文

High-Speed MEMS Micromirror Switching

We report a high-speed MEMS micromirror that switches in 225 ns using 22 V. Switch repetition rates of up to 100 kHz have been demonstrated. These performance characteristics significantly extend the application space of micromirrors.

R. Olsson | O. Spahn | G. Nielson | O.B. Spahn | R.H. Olsson | G.N. Nielson | P.R. Resnick | P. Resnick

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