High-resolution spectrum of xenon ions at 13.4 nm.

The spectrum of xenon excited in a low-inductance vacuum spark was photographed at high resolution in the region of 9.5-15.5 nm. The observed transitions were identified as belonging to ions from Xe8+ to Xe13+. In the region of importance for extreme-ultraviolet lithography around 13.4 nm, the strongest lines were identified as 4d8-4d7 5p transitions in Xe10+. The identifications were made by use of energy parameters extrapolated along the isoelectronic sequence.

[1]  Gerry O'Sullivan,et al.  4d–4f emission resonances in laser-produced plasmas , 1981 .

[2]  Natale M. Ceglio,et al.  Soft x‐ray projection lithography , 1990 .

[3]  U. Feldman,et al.  Vacuum Ultraviolet Source , 1967 .

[4]  S S Churilov,et al.  Analysis of the 4p64d84f and 4p54d10 Configurations of Xe X and Some Highly Excited Levels of Xe VIII and Xe IX Ions , 2002 .

[5]  S. Churilov,et al.  Analysis of the 4d7 (4f + 6p) and 4p54d9 configurations of Sn VII, Sb VIII and Te IX , 1994 .

[6]  M. Klosner,et al.  Intense xenon capillary discharge extreme-ultraviolet source in the 10-16-nm-wavelength region. , 1998, Optics letters.

[7]  J. Reader,et al.  Spectrum and energy levels of seven-times-ionized krypton (Kr VIII) and resonance lines of eight-times-ionized krypton (Kr IX) , 1991 .

[8]  D W Phillion,et al.  X-ray production ˜ 13 nm from laser-produced plasmas for projection x-ray lithography applications. , 1993, Applied optics.

[9]  C. Biedermann,et al.  Line and Band Emission from Tungsten Ions with Charge 21+ to 45+ in the 45-79 Å Range , 2001 .

[10]  Kevin D. Krenz,et al.  High-power extreme-ultraviolet source based on gas jets , 1998, Advanced Lithography.

[11]  V. Kaufman,et al.  Resonance Lines in the Pd I Isoelectronic Sequence: I VIII to Ho XXII , 1982 .

[12]  William T. Silfvast,et al.  Xenon-emission-spectra identification in the 5–20-nm spectral region in highly ionized xenon capillary-discharge plasmas , 2000 .

[13]  S. Churilov,et al.  Interpretation of the level structure of the 4d 8 , 4d 7 (5p + 4f), and 4p 5 4d 9 configurations of the nine-times ionized iodine spectrum (I x) , 1997 .

[14]  Jack Sugar,et al.  Analysis of the 4d 9 –4d 8 5p transitions in nine-times ionized xenon (Xe x) , 1983 .