Structure, mechanical and tribological properties of TiSiC films deposited by magnetron sputtering segment target

In this work, the TiSiC films were deposited by magnetron sputtering segment target with various areal ratio of Ti80Si20 to C. The effects of segment target component on the structure, mechanical and tribological properties of the films were investigated. The results revealed that the deposited films exhibited a structural transform from a cubic TiC structure to a nanocomposite structure with nanocrystalline TiC in a-C:Si matrix, and finally x-ray amorphous structures with decreasing areal ratio of Ti80Si20 to C. The TiSiC film deposited at the Ti80Si20:C areal ratio of 7:7 showed superior mechanical and tribological properties such as high hardness (18.6 Gpa), good scratch resistant (46 N), low friction coefficient (0.2) and low wear rate (8.6  ×  10−7 mm3 Nm−1), which suggests that it is a promising candidate for the protective films.

[1]  A. Rogachev,et al.  Structure, mechanical and tribological properties of Ti-doped amorphous carbon films simultaneously deposited by magnetron sputtering and pulse cathodic arc , 2017 .

[2]  Z. Fogarassy,et al.  TiC crystallite formation and the role of interfacial energies on the composition during the deposition process of TiC/a:C thin films , 2016 .

[3]  A. Rogachev,et al.  Chromium-modified a-C films with advanced structural, mechanical and corrosive-resistant characteristics , 2016 .

[4]  Jinlong Jiang,et al.  Properties of a-C:H:Si thin films deposited by middle-frequency magnetron sputtering , 2016 .

[5]  A. Twardowska,et al.  Lattice dynamics of binary and ternary phases in Ti–Si–C system: A combined Raman spectroscopy and density functional theory study , 2015 .

[6]  A. K. Tyagi,et al.  Wear resistant multiphase compound of Ti(C, O, N)/a-C:H nano composite film , 2015 .

[7]  C. Logofatu,et al.  Growth and Characterization of Arc Evaporated TiSiC–Ni Coatings , 2015, Tribology Letters.

[8]  T. Polcar,et al.  Structural and mechanical properties of nanocrystalline Zr co-sputtered a-C(:H) amorphous films , 2015 .

[9]  U. Jansson,et al.  Incorporation effects of Si in TiCx thin films , 2014 .

[10]  Chih-Chao Yang,et al.  The influence of microstructural variations on mechanical and tribological properties of low-friction TiC/diamond-like carbon nanocomposite films , 2014 .

[11]  Xinchun Chen,et al.  Origin of superlubricity in a-C:H:Si films: a relation to film bonding structure and environmental molecular characteristic. , 2014, ACS applied materials & interfaces.

[12]  Jiang Xu,et al.  Unraveling the mechanical and tribological properties of a novel Ti5Si3/TiC nanocomposite coating synthesized by a double glow discharge plasma technique , 2013 .

[13]  U. Jansson,et al.  Sputter deposition of transition-metal carbide films - A critical review from a chemical perspective , 2013 .

[14]  Wei-min Liu,et al.  A Near‐Frictionless and Extremely Elastic Hydrogenated Amorphous Carbon Film with Self‐Assembled Dual Nanostructure , 2012, Advanced materials.

[15]  Q. Xue,et al.  Tailoring microstructure and phase segregation for low friction carbon-based nanocomposite coatings , 2012 .

[16]  W. Sproul,et al.  The structure and mechanical and tribological properties of TiBCN nanocomposite coatings , 2010 .

[17]  U. Jansson,et al.  Tribofilm formation and tribological properties of TiC and nanocomposite TiAlC coatings , 2009 .

[18]  J. Halbritter,et al.  On the origin of a third spectral component of C1s XPS-spectra for nc-TiC/a-C nanocomposite thin films , 2008 .

[19]  O. Eriksson,et al.  Design of Nanocomposite Low‐Friction Coatings , 2007 .

[20]  E. Bourhis,et al.  Magnetron sputtered Ti–Si–C thin films prepared at low temperatures , 2007 .

[21]  J. Hosson,et al.  Breakdown of the Coulomb friction law in TiC∕a‐C:H nanocomposite coatings , 2006 .

[22]  A. Dorner-Reisel,et al.  Micro‐Raman Studies on DLC coatings , 2005 .

[23]  Y. Cho,et al.  Syntheses and mechanical properties of Ti–B–C–N coatings by a plasma-enhanced chemical vapor deposition , 2004 .

[24]  J. Emmerlich,et al.  Growth of Ti3SiC2 thin films by elemental target magnetron sputtering , 2004 .

[25]  A. Klein,et al.  Wear protective coatings consisting of TiC–SiC–a-C:H deposited by magnetron sputtering , 2003 .

[26]  Sture Hogmark,et al.  Design and evaluation of tribological coatings , 2000 .

[27]  H. Nanto,et al.  Titanium carbide film deposition by DC magnetron reactive sputtering using a solid carbon source , 1999 .

[28]  H. Holleck,et al.  Preparation and properties of metastable TiC/SiC PVD coatings for wear protection , 1991 .

[29]  K. Nakamura,et al.  Chemical sputtering yields of titanium carbides , 1982 .

[30]  Chao Sun,et al.  Mechanical, Microstructural and Tribological Properties of Reactive Magnetron Sputtered Cr-Mo-N Films , 2015 .

[31]  J. Hosson,et al.  Advanced TiC/a-C:H nanocomposite coatings deposited by magnetron sputtering , 2006 .