论文信息 - Effects of rapid thermal annealing on Hf-doped ZnO films grown by atomic layer deposition - 字舞流文

Effects of rapid thermal annealing on Hf-doped ZnO films grown by atomic layer deposition

David-Wei Zhang | Qingqing Sun | S. Ding | Y. Zhang | Shang Zhu | Hongliang Lu | Y. Geng | Hong-Liang Lu