Measurement of PM10 and PM2.5 from silicon carbide particles with cascade impactor based on Surface Acoustic Waves sensors

In this study, we used surface acoustic wave (SAW) sensors based on a delay line configuration for measuring particulates matter (PM10 and PM2.5) mass concentration. These sensors exploit the gravimetric sensitivity of Love waves and operate at 125 MHz. It’s built on AT-cut quartz and use a silica layer as a guide for Love waves. The classification of particles based on their aerodynamic size was achieved using a custom-designed cascade impactor. The particles collected on the surface of the SAW sensor cause a gravimetric effect that changes the Love wave’s phase velocity revealed by a shift of the phase. Hence, monitoring the latter allows the measurement of the mass deposited on the sensor. Our SAW sensors proved its ability to measure PM10 and PM2.5 originated from candle fumes in the 0-500 μg.m−3 concentration range. In th is paper, we present real time measurements of calibrated Silicon Carbide (SiC) solid.