Computer-aided design for VLSI circuit manufacturability

It is noted that the nominal design created by CAD tools must often be modified to maximize manufacturing yield. Such maximization must be performed during the design to achieve an acceptable level of initial manufacturing yield and during fabrication to achieve the maximum rate of yield improvement in the entire product development cycle. The manufacturing-oriented component of the CAD of VLSI circuits is discussed. The concept of design for manufacturability is explained, and a number of issues and design problems relevant to achieving a high level of IC manufacturability are examined. An overview of needed and existing CAD tools that can be used to solve previously listed problems is presented. >

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