Depth position recognition-related laser-induced damage test method based on initial transient damage features.

Even absorptive defects or inner cracks hiding several micrometers to a few dozen micrometers beneath the top surface can induce damage to transmission elements in the ultraviolet band. The extremely small size and disordered state of such defects or cracks hinder their detection using conventional methods. Therefore, the diagnosis of factors that limit damage resistance performance is a key technique for improving the fabrication technology of optical elements. With a focus on laser damage to third-harmonic transmission elements, this study establishes a micron space-resolved and nanosecond time-resolved imaging system on the basis of the pump-probe detection technique. The changes in the properties of defect-induced laser damage in the time domain are clarified. A diagnostic method for original damage depth in micron precision is proposed according to damage behaviors. This method can retrieve initial information on damage inducement and depth position. The recognition and diagnostic capabilities of such a technique are calibrated with artificial samples and then used to analyze real samples.

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