论文信息 - Analytical solutions of sensitivity for pressure microsensors

Analytical solutions of sensitivity for pressure microsensors

Pressure microsensors are normally designed in linear operation range. In this study, analytical solutions are presented in order to offer a set of simple equations to designers and researchers to calculate and predict the sensitivity of pressure microsensors. The pressure sensitivity is proportional to the square of the ratio of diaphragm thickness to diaphragm length, but it is inversely proportional to burst pressure. We found that the analytical solutions are in good agreement with simulation by finite element method.

Chengkuo Lee | Shih-Chin Gong

[1] Charles S. Smith. Piezoresistance Effect in Germanium and Silicon , 1954 .

[2] A. Seidl,et al. A simulation tool for mechanical sensor design , 1992 .

[3] O. N. Tufte,et al. Piezoresistive Properties of Silicon Diffused Layers , 1963 .

[4] R. Cook,et al. Advanced Mechanics of Materials , 1985 .

[5] A Stoffel,et al. Mechanical analysis of polycrystalline and single-crystalline silicon microstructures , 1994 .

[6] F. J. Gracia,et al. A design tool for pressure microsensors based on FEM simulations , 1997 .

[7] K. Wise,et al. SENSIM: A simulation program for solid-state pressure sensors , 1982, IEEE Transactions on Electron Devices.

[8] P. W. Chapman,et al. Silicon Diffused-Element Piezoresistive Diaphragms , 1962 .

[9] S. Timoshenko,et al. THEORY OF PLATES AND SHELLS , 1959 .