论文信息 - Investigation of deep implanted fluorine channeling profiles in silicon using resonant NRA - 字舞流文

Investigation of deep implanted fluorine channeling profiles in silicon using resonant NRA

C. Papadopoulos | M. Posselt | X. Aslanoglou | M. Kokkoris | R. Vlastou | G. Perdikakis | S. Kossionides | S. Harissopulos | R. Grötzschel