On absolute calibration with xenon of laser diagnostic methods based on two-photon absorption

A novel calibration method for the determination of absolute species densities by laser spectroscopy with two-photon absorption is presented. The method is based on a comparative measurement with a noble gas which has a two-photon resonance spectrally close to the transition investigated. Application of this scheme for the calibration of LIF measurements to determine atomic oxygen, generated in a capacitively coupled rf reactor, and for calibration of a RIS measurement of atomic oxygen and carbon generated by sputtering is demonstrated. The relevant excitation cross section of the involved 7p[3/2]2 xenon state, which is used for calibration of atomic oxygen densities, is determined.

[1]  P. S. Ganas.  Optical oscillator strengths for carbon , 1979 .

[2]  I. I. Sobelʹman,et al.  Atomic spectra and radiative transitions , 1979 .

[3]  D. Romanini,et al.  CW cavity ring down spectroscopy , 1997 .

[4]  H. Döbele,et al.  Vacuum ultraviolet absorption spectroscopy in the spectral interval of Lyman‐α of atomic hydrogen and deuterium in an ion source plasma , 1996 .

[5]  M. Pindzola.  Two-photon excitation of atomic oxygen , 1978 .

[6]  D. W. Setser,et al.  Radiative lifetimes and two‐body collisional deactivation rate constants in Ar for Xe(5p56p),Xe(5p56p), and Xe(5p57p) states , 1981 .

[7]  Bamford,et al.  Absolute two-photon absorption and three-photon ionization cross sections for atomic oxygen. , 1986, Physical review. A, General physics.

[8]  R. D. Cowan,et al.  The Theory of Atomic Structure and Spectra , 1981 .

[9]  R. J. Locke,et al.  Laser-based flame species profile measurements: A comparison with flame model predictions , 1993 .

[10]  N. Sadeghi,et al.  Experimental transition probabilities of some Xe(I) lines , 1977 .

[11]  Wende,et al.  Absolute determination of local ground-state densities of atomic hydrogen in nonlocal-thermodynamic-equilibrium environments by two-photon polarization spectroscopy. , 1995, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics.

[12]  Eichler,et al.  Theoretical calculation of two-photon absorption cross sections in atomic oxygen. , 1986, Physical review. A, General physics.

[13]  R. Sillitto.  The Quantum Theory of Light , 1974 .

[14]  T. Cool,et al.  Quantitative measurement of NO density by resonance three-photon ionization. , 1984, Applied optics.