Monolithic two‐section GaInAsP/InP active‐optical‐resonator devices formed by reactive ion etching

Narrow, high‐aspect‐ratio grooves formed by reactive ion etching (RIE) are shown to be useful as partially transmissive mirrors for coupled active laser‐detector, laser‐modulator, and laser‐etalon two‐section monolithic devices. Results emphasize control of the longitudinal mode spectrum by active etalon action.