Determination of the d31 piezoelectric coefficient of PbZrxTi1−xO3 thin films using multilayer buckled micromembranes

The aim of this paper consists in the determination of the piezoelectric transverse coefficient d31 of PbZrxTi1−xO3 (PZT) thin films integrated in dedicated multilayer silicon-based micromembranes exhibiting an initial buckled profile. An analytical model specific to this configuration was built and used for the calculation of d31 starting with the static profiles of the microfabricated devices determined by means of a double-beam interferometer. The influence of dc voltage and buckling effects on the d31 piezoelectric coefficient at the microscale were investigated, and high values were obtained, from 30to75pm∕V, within a hysteresyslike cycle. These results demonstrated the good electrical behavior of PZT thin films at the microscale with a low influence of buckling effects and determined optimal operation conditions for high values of d31.

[1]  Denis Remiens,et al.  True Young modulus of Pb(Zr,Ti)O3 films measured by nanoindentation , 2004 .

[2]  S. Timoshenko,et al.  THEORY OF PLATES AND SHELLS , 1959 .

[3]  Liviu Nicu,et al.  Resonating piezoelectric membranes for microelectromechanically based bioassay: detection of streptavidin–gold nanoparticles interaction with biotinylated DNA , 2005 .

[4]  Hidetoshi Kotera,et al.  Measurement of transverse piezoelectric properties of PZT thin films , 2003 .

[5]  K. F. Badawi,et al.  Study of the mechanical and microstructural state of platinum thin films , 1996 .

[6]  S. D. Collins,et al.  Microfabricated Lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids , 1997 .

[7]  John E. Dolbow,et al.  Effect of out-of-plane properties of a polyimide film on the stress fields in microelectronic structures , 1996 .

[8]  R. Smith,et al.  Vibration of micromachined circular piezoelectric diaphragms , 2006, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[9]  Denis Remiens,et al.  Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering , 1997 .

[10]  S. Timoshenko.  Theory of Elastic Stability , 1936 .

[11]  Min Tae Kim,et al.  Influence of substrates on the elastic reaction of films for the microindentation tests , 1996 .

[12]  D. Remiens,et al.  e31 piezoelectric constant measurement of lead zirconate titanate thin films , 1999 .

[13]  Isaku Kanno,et al.  Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films , 1999 .

[14]  J. Dugundji,et al.  Large Deflections of Clamped Circular Plates Under Initial Tension and Transitions to Membrane Behavior , 1998 .

[15]  Paul Muralt,et al.  Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1−x)O3 thin films , 1999 .

[16]  Characterization of PZT thin films for micromotors , 1995 .

[17]  Zhihong Wang,et al.  Exact solution of multilayered piezoelectric diaphragms. , 2003, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.