Modeling and Analysis of a Linear Resonant Electrostatic Induction Motor Considering Capacitance Imbalance

This paper reports the modeling and analysis of a linear resonant electrostatic induction motor, with an imbalance in capacitance taken into consideration. The motor is an asynchronous motor consisting of film-type stator and slider with three-phase electrodes, driven by three-phase voltage applied to the stator. The slider electrodes are connected to three coils, which enable the slider voltage to rise high at resonance, producing large thrust force. The motor is highly sensitive to an imbalance of capacitance, particularly at resonance. A model is developed to relate each capacitance formed among the electrodes to symmetrical components of the slider voltage and to the thrust force of the motor. The model indicated that the capacitance imbalance leads to an unbalanced slider voltage with two frequency components and causes thrust force ripple. These nonideal effects were confirmed by experiments, using a motor with geometric asymmetry in its electrode design.

[1]  Akio Yamamoto,et al.  A Linear Electrostatic Induction Motor with Coils Mounted on its Slider for Voltage Boosting , 2012 .

[2]  S.D. Umans,et al.  A high-power MEMS electric induction motor , 2004, Journal of Microelectromechanical Systems.

[3]  Bernd Wagner,et al.  Design of asynchronous dielectric micromotors , 1994 .

[4]  Toshiro Higuchi,et al.  Precise positioning using electrostatic glass motor , 2002 .

[5]  Jae-Duk Moon,et al.  A miniature size electrostatic induction motor , 1993, Conference Record of the 1993 IEEE Industry Applications Conference Twenty-Eighth IAS Annual Meeting.

[6]  Akio Yamamoto,et al.  A resonant electrostatic induction motor with piezoelectric elements as inductors connected to its slider electrodes , 2012, 2012 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[7]  Toshiki Niino,et al.  High Power Electrostatic Motor Using Skewed Electrodes , 1997 .

[8]  Akio Yamamoto,et al.  An electrostatic induction motor utilizing electrical resonance for torque enhancement , 2012 .

[9]  Toshiro Higuchi,et al.  INDUCTION MOTORS WITH ELECTROSTATIC SUSPENSION , 1998 .

[10]  Toshiro Higuchi,et al.  Experimental investigation of parameters influencing electrostatic motor’s performance with air bearing operation , 2009 .

[11]  A. Yamamoto,et al.  Effects of Electrode Configuration for Performances of Voltage-Induction-Type Electrostatic Motors , 2013 .

[12]  R. Ghodssi,et al.  An electric induction micromotor , 2005, Journal of Microelectromechanical Systems.

[13]  J. Stringer Electrostatic Motors , 1962, Nature.

[14]  S.D. Umans,et al.  A Self-Excited MEMS Electro-Quasi-Static Induction Turbine Generator , 2009, Journal of Microelectromechanical Systems.

[15]  C. Fortescue Method of Symmetrical Co-Ordinates Applied to the Solution of Polyphase Networks , 1918, Transactions of the American Institute of Electrical Engineers.

[16]  B. Trannoy,et al.  Synthesis and modelling of an electrostatic induction motor , 1995 .

[17]  J. H. Calderwood,et al.  Asynchronous dielectric induction motor , 1990 .

[18]  T. Higuchi,et al.  Dual excitation multiphase electrostatic drive , 1995, IAS '95. Conference Record of the 1995 IEEE Industry Applications Conference Thirtieth IAS Annual Meeting.

[19]  Toshiki Niino,et al.  Modeling and identification of an electrostatic motor , 2006 .