Determination of elastic modulus of thin layers

The elastic modulus of thin surface layers and metallic or ceramic coatings (thickness 0.1 to 10 μm) can be measured in various ways. In the paper, three methods are discussed; nanoindentation, beam bending method and beam resonance method, The principle of each method is explained, and the advantages and drawbacks are summarised. Also practical recommendations are given, which were derived from measurements on giant magnetostrictive TbFe/FeCo multilayers.