Analysis of material modifications induced during laser damage in SiO2 thin films

The damage mechanisms in silica thin films exposed to high fluence 1064 nm nano-second laser pulses are investigated. The thin films under study are made with different techniques (evaporation and sputtering, with and without ion assistance) and the results are compared. The material morphological, optical and structural modifications are locally analyzed with optical microscopy and profilometry, photoluminescence and absorption microscopies. These observations are made for fluences near and above the laser damage threshold, and also in the case of multiple pulse irradiations. An increase in absorption in and around the damages is observed, as well as the generation of different defects that we spatially resolve with absorption and luminescence mappings.

[1]  L. Skuja.  Optically active oxygen-deficiency-related centers in amorphous silicon dioxide , 1998 .

[2]  Stavros G. Demos,et al.  Luminescence investigation of SiO2 surfaces damaged by 0.35-nm laser illumination , 2000, Laser Damage.

[3]  Leonid B. Glebov.  Optical absorption and ionization of silicate glasses , 2001, SPIE Laser Damage.

[4]  Mireille Commandré,et al.  Measurements of absorption losses in TiO(2) films by a collinear photothermal deflection technique. , 1990, Applied optics.

[5]  Kaoru Minoshima,et al.  Characterization of laser induced damage sites in optical components. , 2002, Optics express.

[6]  Herve Bercegol,et al.  Electron kinetics and emission for metal nanoparticles exposed to intense laser pulses , 2003 .

[7]  P. Combis,et al.  Numerical simulations for description of UV laser interaction with gold nanoparticles embedded in silica , 2004 .

[8]  Marco Cannas,et al.  Experimental evidence of the composite nature of the 3.1 eV luminescence in natural silica , 1996 .

[9]  Laurent Gallais,et al.  Simultaneous absorption, scattering, and luminescence mappings for the characterization of optical coatings and surfaces. , 2006, Applied optics.

[10]  Patrick Combis,et al.  Photothermal investigation of the laser-induced modification of a single gold nano-particle in a silica film , 2005 .

[11]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[12]  Christopher J. Stolz,et al.  Laser Resistant Coatings , 2003 .

[13]  Claude Amra,et al.  Optical measurement of size and complex index of laser-damage precursors: the inverse problem , 2004 .

[14]  A. H. Guenther,et al.  LASER-INDUCED DAMAGE OF OPTICAL MATERIALS , 1978 .

[15]  Michel Lequime,et al.  Laser damage resistance of silica thin films deposited by Electron Beam Deposition, Ion Assisted Deposition, Reactive Low Voltage Ion Plating and Dual Ion Beam Sputtering , 2007 .

[16]  N. Bloembergen.  Role of cracks, pores, and absorbing inclusions on laser induced damage threshold at surfaces of transparent dielectrics. , 1973, Applied optics.

[17]  S. Papernov,et al.  Localized absorption effects during 351 nm, pulsed laser irradiation of dielectric multilayer thin films , 1997 .

[18]  M. F. Koldunov,et al.  Theory of laser-induced damage to optical coatings: inclusion-initiated thermal explosion mechanism , 1994, Laser Damage.

[19]  Caroline Fossati,et al.  Photothermal deflection microscopy for imaging sub-micronic defects in optical materials , 2004 .

[20]  Andre Stesmans,et al.  Defects induced in fused silica by high fluence ultraviolet laser pulses at 355 nm , 2002 .

[21]  S. Papernov,et al.  Two mechanisms of crater formation in ultraviolet-pulsed-laser irradiated SiO2 thin films with artificial defects , 2005 .

[22]  Laurent Gallais,et al.  Optimized metrology for laser-damage measurement: application to multiparameter study. , 2003, Applied optics.

[23]  N. Kaiser,et al.  Optical interference coatings , 2003 .

[24]  Alberto Salleo,et al.  Laser-driven formation of a high-pressure phase in amorphous silica , 2002, Nature materials.

[25]  Stavros G. Demos,et al.  Optical defects produced in fused silica during laser-induced breakdown , 2003 .

[26]  Andrew G. Glen,et al.  APPL , 2001 .