Micromirror SLM for femtosecond pulse shaping in the ultraviolet

Abstract.We present the application of a novel micro mirror array, which is based on a micro electro mechanical system (MEMS), as one- and two-dimensional phase-modulating spatial light modulator (SLM) for femtosecond pulse shaping in the spectral region from the deep-ultraviolet (DUV) to the near-infrared (NIR) (200–900 nm). Using such a high-resolution MEMS-SLM, we demonstrate one-dimensional pulse shaping at 400 nm, including THz-pulse train generation, chirp compensation, and phase wraps.