论文信息 - Improved determination of matrix compostion of Hg1−xCdxTe by SIMS

Improved determination of matrix compostion of Hg1−xCdxTe by SIMS

Results are presented to show an improved method for composition characterization of HgCdTe heterostructure using secondary ion mass spectroscopy. This method utilizes the molecular ions CsM+ rather than M± ions. The advantage is that the molecular CsM+ ion yield, unlike the atomic M± ions, is quite insensitive to the matrix material from which they are emitted. Composition of multilayer HgCdTe structure can be determined with excellent accuracy and depth resolution. Layer thickness of HgCdTe heterostructure can also be calibrated.

Larry Wang | Jack Sheng | G. Lux | Yumin Gao

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