Design, Modeling and Control of Nanopositioning Systems

Introduction.- Piezoelectric Transducers.- Types of Nanopositioners.- Mechanical Design: Flexure-based Nanopositioners.- Position Sensors.- Shunt Control.- Feedback Control.- Force Feedback Control.- Feedforward Control.- Command Shaping.- Hysteresis Modeling and Control.- Charge Drives.- Noise in Nanopositioning Systems.- Electrical Considerations.