论文信息 - Epitaxial growth of TiC on (0001) 4H-SiC substrate by reactive sputtering - 字舞流文

Epitaxial growth of TiC on (0001) 4H-SiC substrate by reactive sputtering

C. Ko | Kun-An Chiu | P. Wu | Li Chang | Jing Lin | K. Lin | Hsueh-I Chen | Chun-Hua Chen