Terahertz microsensor for biomedical applications

A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.