Quadriwave lateral shearing interferometer based on a randomly encoded hybrid grating.
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Dong Liu | Jian Bai | Tong Ling | Yibing Shen | Xiumei Yue | Yongying Yang | Yongying Yang | Tong Ling | J. Bai | Yibing Shen | Dong Liu | Xiumei Yue
[1] Dong Liu,et al. Common-path and compact wavefront diagnosis system based on cross grating lateral shearing interferometer. , 2014, Applied optics.
[2] J Primot,et al. Extended hartmann test based on the pseudoguiding property of a hartmann mask completed by a phase chessboard. , 2000, Applied optics.
[3] M. Takeda,et al. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry , 1982 .
[4] William Boucher,et al. Aspherical surface measurement using quadri-wave lateral shearing interferometry , 2011, Optical Metrology.
[5] Masanobu Hasegawa,et al. Comparison of EUV interferometry methods in EUVA project , 2005, SPIE Advanced Lithography.
[6] Osami Sasaki,et al. Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms. , 2012, Applied optics.
[7] Mathieu Cohen,et al. Wave-front reconstruction from multidirectional phase derivatives generated by multilateral shearing interferometers. , 2005, Optics letters.
[8] Dong Liu,et al. Wavefront retrieval for cross-grating lateral shearing interferometer based on differential Zernike polynomial fitting , 2013, Optics & Photonics - Optical Engineering + Applications.
[9] Mathieu Cohen,et al. Compact high resolution four wave lateral shearing interferometer , 2004, SPIE Optical Systems Design.
[10] J Primot,et al. Three-wave lateral shearing interferometer. , 1993, Applied optics.