论文信息 - Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)

Microfabrication of an integrated SU-8 waveguide with an embedded focusing lens for application in single-molecule detection (SMD)

This paper reports a research effort to design, microfabricate, and test a uniquely designed waveguide technology with integrated micro-lenses in vertical orientations. The waveguide and integrated focusing lenses were microfabricated using thick photo-resist such as SU-8 with UV-light lithography. The waveguide can be used in various biological and biomedical systems.

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