Preliminary tests using an inductively coupled plasma (ICP) reactor to abate C2F6, CF4, and CHF3 show promising results. In conjunction with this, some of the operating parameters, which need to be considered when trying to obtain maximum abatement efficiency, are explored. Near 100% destruction efficiency (DRE) for the persistently fluorinated compounds (PFCs) mentioned earlier has been achieved with O2 as the additive gas. Similarly, the abatement of CF4 with CH4 and/or CH4/O2 as the additive gas, has shown comparable results. For the non-CF4 PFCs, like C2F6 and CHF3, the formation of CF4 as an abatement by-product was monitored and shown that it can be controlled by varying the operating parameters of the ICP reactor. The trends in the DRE observed while manipulating the ICP operating parameters such as ICP power, residence time, amount/type of additive gas, and Ar dilution, show that there are trade offs which must be taken into account. A quadrupole mass spectrometer was used for analyzing the abatem...