반도체 레이저를 이용한 파티클 센서 개발
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The particle sensor developed in this study is small-sized and low-priced. the sensing method was measured by mie scattering. Laser beam of the particle sensor was efficiently controlled by aspherics mirror and scattering beam was focus on detector by ellipse mirror. Differential comparison amplification method in the particle detection circuit was adapted to enlarge the ratio of signal to noise. A standard PSL(polystylen-laterx) generator was manufactured in ascertaining the performance of the particle sensor. The particle sensor developed in this study is capable of evaluating the particle size of 0.3 ㎛. The particle sensor is exactly right on applicable in the clean room monitoring system and the IAQ control system.